AXI (Automated X-ray Inspection) is becoming critical for both advanced semiconductor nodes and 2.5D / 3D advanced packaging. Advanced packaging makes “invisible defects” the dominant failure mode. AXI is no longer optional—it’s foundational infrastructure. Why AXI Is Becoming Essential 1. Packaging Complexity Is Exploding Advanced packaging introduces hidden structures that cannot be inspected optically: ➡Micro-bumps (≤ 20 µm, moving toward single-digit µm) ➡Cu-Cu hybrid bonding ➡TSVs (Through-Silicon Vias) ➡RDL layers in Fan-Out / Fan-In ➡Interposers (silicon & organic) ➡ Optical inspection cannot see inside ➡ AXI becomes the only viable non-destructive solution Key AXI Use Cases in 2.5D / 3D Packaging for Micro-bump & Hybrid Bond Inspection Detect: ➡Voids ➡Non-wet opens ➡Misalignment ➡Partial bonding defects Critical for: ➡Chip-on-Wafer (CoW) ➡Wafer-on-Wafer (WoW) ➡Die-to-Die bonding 🔹 TSV Integrity (AXI enables detection of) ➡Voids in TSV fill ➡Seam defects ➡Mis-etch / incomplete fill ➡Cracks after thermal cycling 🔹 RDL & Interposer Inspection (AXI helps verify) ➡Line continuity ➡Shorts / opens ➡Mis-registration between layers ➡Hidden delamination Advanced substrate inspection ➡ Yield loss at advanced nodes is extremely expensive, so early AXI detection = major cost savings Technology Trends in AXI ➡Higher Resolution & Energy Control ➡Sub-micron focal spot X-ray sources ➡Variable energy for different materials (Cu, Sn, Si) AI-Driven Defect Classification ➡Automated void quantification ➡Pattern recognition for bonding anomalies ➡Reducing false calls in high-volume manufacturing Resolution vs. throughput is the fundamental bottleneck of AXI, and it’s becoming more painful as 2.5D/3D packaging scales. ➡The Core Trade-off: Resolution ↔ Throughput To resolve micro-bumps, Cu-Cu bonds, TSV seams, AXI needs: ➡Smaller X-ray focal spot ➡Higher magnification ➡Longer exposure time ➡More projections (for CT / laminography) You cannot simultaneously maximize: ➡Resolution ➡Throughput ➡Field of view ➡Penetration depth Hybrid Inspection Strategy (Most Common) ➡Inline low-res AXI → screen gross defects ➡Offline high-res AXI / CT → root cause & qualification
Not sure why but what I understand is that in advanced packaging SWIR optical inspection and metrology is more popular than X-RAY. Is the precision of X-ray inspection adequate for semiconductor industry?
🔍 Thanks for the deep dive into AXI! The resolution‑throughput trade‑off you highlighted is a real pain point—especially as micro‑bump sizes shrink into the single‑digit µm range. In my experience, a hybrid approach that couples low‑res inline AXI with targeted high‑res CT scans tends to work best, but I'm curious how teams are balancing the longer exposure times and increased projections against the need for high throughput. Are there any emerging detector technologies or AI‑driven workflow optimizations that are showing promise in breaking this bottleneck? 🚀
Great overview, Eric - this clearly captures why AXI is emerging as a foundational infrastructure as advanced packaging scales. The way you connect invisible defects with resolution vs. throughput trade-off really resonates well with me. Having said that the recent development in sources, detectors, software as well as instrument design is pushing the limits and significantly improving both throughput and resolution at the same time. Still with same trade-off - just that the bar is pushed. For anyone looking to go deeper on the technology side, these whitepapers provide useful context and case studies on how modern X-ray sources, CT, and laminography are being applied in advanced packaging inspection: • X-ray imaging fundamentals for electronics & semiconductor inspection https://www.excillum.com/unlocking-the-mystery-of-x-ray-imaging-for-electronics-and-semiconductor-inspection/ • Optimized nano-CT case studies in advanced packaging https://www.excillum.com/revealing-the-invisible-optimized-nano-ct-case-studies-in-advanced-packaging/ • Laminography as a non-destructive 3D X-ray approach for advanced packaging https://www.excillum.com/laminography-a-non-destructive-3d-x-ray-breakthrough-for-advanced-packaging/
One of the key issues for AXI on Advanced Packaging is that HBM can be damaged or impacted by Xray exposure even with low dosage like 100mGy level. To adapt it as this inline metrology, we still need the industry solution of AXI with lower dosage, good resolution and enough speed in this area.
Advanced Packaging is exactly where high-resolution AXI makes the difference. With the iX7059 ONE, we’ve built a system purpose-designed for these challenges – pushing resolution, stability, and insight to where the industry is heading. #AdvancedPackaging #Viscom #AXI #iX7059
I fully agree and there is definitely the need of nano resolution laminography (and still of course 2D X-ray and CT). We are working on that and I am glad to see that we recognized the trend
Probably much more development/opportunities will happen at packaging layer than at semi transistor layer in following years.
Great summary Eric. With the Nordson XM8000 we have a platform which addresses all advanced packaging metrology and defect analysis requirements. Measuring the invisible! #XM8000 #AdvancedPackaging #CoWoS #CoPoS
Great overview, very clear. For an X-ray source that addresses the resolution vs throughput tradeoff in semi applications, check out the Comet Fyne. https://comet.tech/en/news/fyne-introduction